Gas Recovery for Electronic Materials
Silicon crystal growth, particularly in the Czochralski (Cz) process, requires large volumes of argon across multiple furnaces and growers. For smaller sites with a few growers, point-of-use (POU) argon recycle is often used. For larger manufacturers, a central recovery system provides much greater value at a lower cost.
We offer systems that recover these gases and purify them for reuse in your existing process, while meeting or exceeding the same quality standards as the original gas.